JPH0330258B2 - - Google Patents

Info

Publication number
JPH0330258B2
JPH0330258B2 JP53015306A JP1530678A JPH0330258B2 JP H0330258 B2 JPH0330258 B2 JP H0330258B2 JP 53015306 A JP53015306 A JP 53015306A JP 1530678 A JP1530678 A JP 1530678A JP H0330258 B2 JPH0330258 B2 JP H0330258B2
Authority
JP
Japan
Prior art keywords
electronic
test
probe
potential
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP53015306A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53121476A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS53121476A publication Critical patent/JPS53121476A/ja
Publication of JPH0330258B2 publication Critical patent/JPH0330258B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G01R31/306—Contactless testing using electron beams of printed or hybrid circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP1530678A 1977-02-11 1978-02-13 Method of testing electronic circuit network Granted JPS53121476A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5835/77A GB1594597A (en) 1977-02-11 1977-02-11 Electron probe testing analysis and fault diagnosis in electronic circuits

Publications (2)

Publication Number Publication Date
JPS53121476A JPS53121476A (en) 1978-10-23
JPH0330258B2 true JPH0330258B2 (en]) 1991-04-26

Family

ID=9803533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1530678A Granted JPS53121476A (en) 1977-02-11 1978-02-13 Method of testing electronic circuit network

Country Status (6)

Country Link
JP (1) JPS53121476A (en])
DE (1) DE2805673A1 (en])
FR (1) FR2380556A1 (en])
GB (1) GB1594597A (en])
NL (1) NL7801558A (en])
SE (1) SE425869B (en])

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2902495A1 (de) * 1979-01-23 1980-07-31 Siemens Ag Einrichtung zur beruehrungslosen potentialmessung
DE3036713A1 (de) * 1980-09-29 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Verfahren und anordnung zur quantitativen potentialmessung an oberflaechenwellenfiltern
DE3110140A1 (de) * 1981-03-16 1982-09-23 Siemens AG, 1000 Berlin und 8000 München Vorrichtung und verfahren fuer eine rasche interne logikpruefung an integrierten schaltungen
DE3138901A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verbessertes gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik
DE3138990A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Koaxiales gegenfeld-spektrometer hoher akzeptanz fuersekundaerelektronen und elektronenstrahl-messgeraet
DE3138926A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Elektronenoptische anordnung fuer die hochaufloesende elektronenstrahl-messtechnik
DE3206309A1 (de) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München Sekundaerelektronen-spektrometer und verfahren zu seinem betrieb
DE3232671A1 (de) * 1982-09-02 1984-03-08 Siemens AG, 1000 Berlin und 8000 München Anordnung und verfahren zur spannungsmessung an einem vergrabenen messobjekt
DE3235698A1 (de) * 1982-09-27 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Vorrichtung und verfahren zur direkten messung von signalverlaeufen an mehreren messpunkten mit hoher zeitaufloesung
JPH0646550B2 (ja) * 1985-08-19 1994-06-15 株式会社東芝 電子ビ−ム定位置照射制御方法および電子ビ−ム定位置照射制御装置
DE3685331D1 (de) * 1986-10-23 1992-06-17 Ibm Verfahren zur pruefung von platinen fuer integrierte schaltungen mittels eines lasers im vakuum.
DE3719202A1 (de) * 1987-06-09 1988-12-29 Siemens Ag Verfahren zur automatischen pruefung von elektrischen baugruppen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3549999A (en) * 1968-06-05 1970-12-22 Gen Electric Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit
GB1286454A (en) * 1968-08-24 1972-08-23 Cambridge Scientific Instr Ltd Surface potential analysis by electron beams
DE1946931A1 (de) * 1969-09-17 1971-03-18 Gen Electric Verfahren zum Pruefen von Schaltungen und Vorrichtung zur Ausfuehrung des Verfahrens
US3796947A (en) * 1973-02-27 1974-03-12 Bell Telephone Labor Inc Electron beam testing of film integrated circuits
JPS5093078A (en]) * 1973-12-17 1975-07-24
JPS51108569A (en) * 1975-03-19 1976-09-25 Hitachi Ltd Sosadenshikenbikyo mataha ruijisochi

Also Published As

Publication number Publication date
GB1594597A (en) 1981-07-30
FR2380556B1 (en]) 1985-02-08
NL7801558A (nl) 1978-08-15
DE2805673A1 (de) 1978-08-17
FR2380556A1 (fr) 1978-09-08
SE7801530L (sv) 1978-08-12
SE425869B (sv) 1982-11-15
JPS53121476A (en) 1978-10-23

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